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Micro-Electro-Mechanical Systems (MEMS)
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Introduction
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The term MEMS refers to devices that characteristically have a length of less than 1mm but more than 1μm and combine electrical and mechanical components. They are fabricated using integrated circuit batch-processing technologies or other micromachining technologies.
A trial-and-error design methodology, combined with the length of time and high cost associated with MEMS prototyping, results in an inefficient and ineffective product development scenario. Virtual CAD prototyping and simulation are extremely important approaches in obtaining cost effective and high performance MEMS designs.
The NCHC's MEMS team has obtained the following results:
- The integration of CAE manpower in multidiscipline fields to form a professional MEMS R&D team,
- The construction of an integrated CAD Software framework for microsystems,
- The development of microsystem CAD/CAE technologies,
- The construction of simulation know-how and design-related databases,
- The application of CAD/CAE to microsystems, and
- MEMS device & macromodeling
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Fundamental MEMS R&D Topics:
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RF MEMS
- Full-mesh simulation, macromodel development, and design for RF MEMS devices
- Thin Film Bulk Acoustic Resonator (FBARS) design and analysis
- Microinductor characteristics
Professional Experience:
- Analysis of low and high frequency resistance, inductance, and quality factor of microcoils, combined with structural deformation
- High frequency analysis of RF switches
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Sensors and Actuators
- Full-mesh simulation, macromodel development, and design of MEMS sensors and actuators with a particular focus on multi-level and multi-physics technologies
- Characteristics and macromodels of linear comb fingers
- Low-bias micro acoustic sensing modules
Professional Experience:
- Parametric modeling and simulation for microacclerometers
- Mechanical property extraction and simulation of the mechanical characteristics of a micro bolometers used for infrared detection
- Electrodes optimal design for focused thin film mirror driven by electrostatic force
- Simulation model and characteristics of magnetic force induced by microcoils
- Magnetic force and characteristics analysis of a rotational optical switch
- Characterization analysis of a rotational micro-mirror for a variable optical attenuator
- Dynamic analysis of optical scanning micromirror with vertical combs
- Simulation of a CMOS MEMS tunable capacitor
- Simulation and parametric study of scratch drive actuators
- Finite element models of silicon torsion bars
- Accurate electrostatic force simulation technique of comb FEM models
- Compressive residual stress extraction via beam post buckling deformation
- Development of a geometric generator for MEMS processes
- Quantify the largely tilted mirror switching time through the analysis and parameterization of the air damping magnitude of the switching mirror.
- Optimize the design of micro pump's piezoelectric actuation device
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Microfluidics and Bio-Sensors
- Micro-processing chips (Lab-on-a-Chip), inkjet printing, fluid-structure interaction, drug delivery system, and multi-phase flow analysis
- A multiphase flow simulation in a MEMS diaphragm drop ejector
- The simulation and analysis of two fluid flows within a micro pump
- A numerical analysis of the effects of frequency on mono-sized droplet formations
- Numerical modeling and simulation of fluidic self-alignment by surface tension on a micro parts assembly
Professional Experience:
- Analysis of the design efficiency on the miniaturization of a rotational biological flow sensor
- Electroosmotic flow analysis and application for Microfluidics
- Dynamic control of spotting volumes on microarrays from a split-pin-based non-contact spotting method
- A computational analyses of mTotal Analysis Systems with applications such as capillary electrophoretic separation of DNA fragment, chemical reactions of Y-shaped diffusive mixer, and DNA amplification process
- Integration of fluidic/optical system for genomic analysis and chemical/biological warfare detection
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